Conductively-cooled slab laser

ABSTRACT

A carbon dioxide gas-discharge slab-laser is assembled in a laser-housing. The laser-housing is formed from a hollow extrusion. An interior surface of the extrusion provides a ground electrode of the laser. Another live electrode is located within the extrusion, electrically insulated from and parallel to the ground electrode, forming a discharge-gap of the slab-laser. The electrodes are spaced apart by parallel ceramic strips. Neither the extrusion, nor the live electrode, include fluid coolant channels. The laser-housing is cooled by fluid-cooled plates attached to the outside thereof.

PRIORITY

This application is a continuation of U.S. patent application Ser. No.15/914,343, filed Mar. 7, 2018, the disclosure of which is incorporatedherein in its entirety.

TECHNICAL FIELD OF THE INVENTION

The present invention relates in general to carbon dioxide (CO₂) lasers.The invention relates in particular to pulsed CO₂ gas-discharge lasershaving a slab configuration.

DISCUSSION OF BACKGROUND ART

CO₂ lasers have been used for decades in industrial processes, whereinthe infrared (IR) wavelength and relatively high power of a CO₂ laser isadvantageous. The lasing medium in a CO₂ laser is a gas-discharge in agas mixture. The gas mixture typically includes 10% to 20% CO₂ and ismaintained at less than one atmosphere of pressure. The gas mixture isenergized to generate the gas-discharge by applying an electric currentor a radio-frequency (RF) field between two electrodes. CO₂ lasers candeliver output laser-radiation at infrared wavelengths within a rangefrom about 9 micrometers (μm) to about 11 μm. A CO₂ laser may beconfigured as a waveguide-laser or a slab-laser.

In a waveguide CO₂ laser, the gas-discharge is established within a longand comparatively narrow waveguide. A laser-resonator is formed aroundthe energized gas mixture by resonator mirrors, located at each end ofthe waveguide, that direct laser-radiation a longitudinal direction. Thenarrow waveguide constrains one or more laser-radiation modes in twomutually-orthogonal transverse directions. Laser-radiation is amplifiedby stimulated emission during multiple passes through the gas-discharge.Such CO₂ waveguide-lasers are capable of providing an inherentlyhigh-quality output beam, with good power and wavelength stability, butat relatively low average powers. Typically, at an average power lessthan about 150 Watts (W). Such a waveguide CO₂ laser is described inU.S. Pat. Nos. 6,192,061 and 6,788,722, each thereof owned by theassignee of the present invention and the complete disclosure of each ishereby incorporated herein by reference.

In a slab CO₂ laser, the gas-discharge is established in a volumebetween flat wave-guiding surfaces of two closely-spaced electrodes. Alaser-resonator is formed around the energized gas mixture by tworesonator mirrors. In one transverse direction, the small gap(“discharge-gap”) between the two electrodes defines a waveguide thatconstrains laser-radiation modes. In the orthogonal transversedirection, the resonator mirrors typically define an unstablelaser-resonator. Laser-radiation exits the unstable laser-resonator asan approximately collimated beam, passing through a hole in one of theresonator mirrors or passing by an outside edge of one of the resonatormirrors. Such a slab CO₂ laser is described in U.S. Pat. Nos. 6,256,332and 7,263,116, each thereof owned by the assignee of the presentinvention and the complete disclosure of each is hereby incorporatedherein by reference.

Such slab CO₂ lasers are capable of delivering an output beam at anaverage power of up to about 8 kilowatts (kW). However, the output beaminherently has an elongated cross-section. Additional beam-conditioningoptics are required to transform the output beam into a more usefulcross-sectional shape. For example, a circular shape.

Slab CO₂ lasers are usually operated in a pulsed mode, delivering pulsesof laser-radiation having high peak powers. In many industriallaser-processes, higher average power translates to higher throughput.Process efficiency justifies a laser cost that scales with averagepower. Usually, the cost scaling results from a need to provide complexcooling arrangements to cope with waste heat generated when operating athigh average power. Typically, a fluid coolant is forced throughchannels within one or both of the electrodes. Alternatively, air isforced through an array of metal fins that are in direct thermal contactwith one or both of the electrodes. Liquid water is a preferred coolantin many applications because water has a comparatively high heatcapacity for efficiently removing substantial waste heat and becausefluid-cooling generates less acoustic noise than equivalent forced-aircooling.

In recent years, pulsed slab CO₂ lasers have been used increasingly indental applications, including both hard-tissue and soft-tissueoperations, where the relatively long IR wavelength permits cutting andcoagulation at the same time. The relatively high cost of industrialslab-lasers can be prohibitive for a dental practice, where othersurgical alternatives are available, albeit less convenient for thesurgeon and often more painful for the patient.

Dental operations using CO₂ lasers usually require a relatively highpeak power, but this can be at a relatively low duty-cycle, so a highaverage power has little utility. There is a need for a CO₂ slab-laserthat can deliver radiation at a high peak power, but at a relatively lowaverage power, thereby eliminating the need for the complex coolingarrangements that increase cost.

SUMMARY OF THE INVENTION

In one aspect, a gas-discharge slab-laser in accordance with the presentinvention comprises a laser-housing, including an elongated hollowextrusion having an interior surface thereof, forming a first elongatedelectrode. A second elongated electrode is located within the elongatedextrusion. The second elongated electrode is spaced-apart and parallelto the first elongated electrode. The spaced-apart first and secondelongated electrodes define a discharge-gap of the slab-laser. Neitherthe elongated extrusion nor the second elongated electrode include anyfluid-cooling means. The first and second elongated electrodes arespaced apart by either first and second elongated ceramic strips, whichare laterally-separated and parallel to each other.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are incorporated in and constitute apart of the specification, schematically illustrate a preferredembodiment of the present invention, and together with the generaldescription given above and the detailed description of the preferredembodiment given below, serve to explain principles of the presentinvention.

FIG. 1 is a perspective view, schematically illustrating basic featuresand function of a prior-art CO₂ slab-laser.

FIG. 2 is a perspective view, partially cut-away, schematicallyillustrating one preferred embodiment of a CO₂ slab-laser in accordancewith the present invention, including an elongated hollow extrusion, theextrusion providing a ground electrode for the laser, a live electrodespaced apart from the ground electrode by a pair of elongated ceramicstrips, with edges of the ceramic strips defining a width of adischarge-volume of the laser.

FIG. 3 is a perspective view, partially cut-away, schematicallyillustrating another preferred embodiment of a CO₂ slab-laser inaccordance with the present invention, similar to the embodiment of FIG.2, but having the two electrodes spaced apart by an elongated ceramicmember, which has parallel raised edges extending therealong, the raisededges defining a width of a discharge-volume of the laser.

FIG. 4 is a perspective view, partially cut-away, schematicallyillustrating yet another preferred embodiment of a CO₂ slab-laser inaccordance with the present invention, similar to the embodiment of FIG.2, but wherein a width of a discharge-volume is defined bymutually-separated and parallel grooves extending along the groundelectrode.

FIG. 5 is a cross-section view, seen generally in the direction 5-5 ofFIG. 4, schematically illustrating fluid-cooled cooling-plates attachedto upper and lower exterior surfaces of the elongated extrusion.

FIG. 6 is a perspective view, cut away, schematically illustrating stillanother preferred embodiment of a CO₂ slab-laser in accordance with thepresent invention, similar to the embodiment of FIG. 2, but wherein eachelongated ceramic strip is formed by a plurality of ceramic segments.

DETAILED DESCRIPTION OF THE INVENTION

Turning now to the drawings, wherein like features are designated bylike reference numerals, FIG. 1 is a perspective view, schematicallyillustrating basic features and function of a prior-art CO₂ slab-laser10. Laser 10 includes upper and lower electrodes, 12 and 14respectively, which each have a rectangular shape. The electrodes arespaced apart and parallel to each other, defining a discharge-gap 16thereinbetween. In high-power slab-lasers, particularly multi-kilowattslab-lasers, it is usual to provide direct fluid-cooling through theelectrodes, as indicated in the drawing for upper electrode 12.

Discharge-gap 16 is located in an unstable resonator formed by concavemirrors 18 and 20. An RF power source 22 is electrically connected toupper electrode 12. Lower electrode 14 is grounded. Typically, theelectrodes are located within a gas-tight housing (not shown) thatcontains the gas mixture. Gas mixtures for CO₂ discharge lasers are wellknown in the art. Component gases and pressure may vary according tomanufacturer preferences and are usually proprietary.

When RF power is applied to upper electrode 12 to energize the gasmixture, a gas-discharge is struck in discharge-gap 16, therebyproviding optical gain in the resonator formed by mirrors 18 and 20.Laser-radiation circulates in the resonator, as indicated by dashedlines 24, and is progressively amplified by optical gain provided by thegas-discharge in discharge-gap 16. The progressively amplifiedlaser-radiation fills mirror 20. A portion thereof spills out of theresonator, past mirror 18, as output laser-radiation indicated by dashedlines 26.

Output laser-radiation 26 is in the form of an expanding beam having arectangular cross-section. Optionally, beam-conditioning optics 28 maybe provided to convert the beam to a more useful form, such as acollimated beam 30 having an about circular cross-section.Beam-conditioning optics are typically located outside the gas-tighthousing. Such beam conditioning optics are well-known in the art and adetailed description thereof is not necessary for understandingprinciples of a CO₂ slab-laser.

FIG. 2 is a perspective view, partially cut away, schematicallyillustrating one preferred embodiment 40 of CO₂ slab-laser in accordancewith the present invention. Laser 40 has a gas-tight housing 42,including an elongated hollow extrusion 44A, shown partially cut-away toillustrate internal components and arrangements of the laser. Theextrusion is preferentially made of aluminum and is at electricalground, as depicted in the drawing. An end-plate 46, including oneresonator mirror (not visible in the drawing), provides for sealinglaser-housing 42 at one end. Screw-holes 48 provide for attachinganother end-plate and another resonator-mirror (neither shown), forsealing laser-housing 42 at the opposite end. Additional screw holes 50provide for attaching an optional cooling-plate, described in detailfurther hereinbelow.

An interior surface 52A of extrusion 44A provides an elongated groundelectrode for the laser, which extends along the length of extrusion44A. An elongated live electrode 54A having a lower surface 56A islocated within extrusion 44A. Live surface 56A is spaced apart fromgrounded surface 52A by a pair of elongated ceramic strips 58A, whichare laterally-separated and parallel to each other. Ceramic strips 58Aare preferably made of an electrically-insulating ceramic having arelatively high thermal conductivity. For example, made of aluminumnitride (AlN), aluminum oxide (Al₂O₃), or beryllium oxide (BeO). Theinventive ceramic strips are highlighted in the drawing by diagonalhatching.

Spaced-apart grounded surface 52A and live surface 56A define adischarge-gap of laser 40. Specifically, the common height of ceramicstrips 58A defines the height of a discharge-volume 60A, while edges 62of ceramic strips 58A constrain the gas-discharge laterally and thusdefine a width of the discharge-volume. Altogether, the length of liveelectrode 54A, the discharge-gap, and edges 62 define discharge-volume60A. The discharge-volume is depicted in cross-section in the drawingand indicated by cross-hatching. Grounded surface 52A and live surface56A are preferably polished.

A pair of insulator strips 64 electrically isolate live electrode 54Afrom grounded extrusion 44A. Spring strips 66 provided for retaininglive electrode 54A in position within the extrusion. An electricalfeed-through 68 is provided for connecting RF-power to live electrode54A. Feed-through 68 is electrically connected to live electrode 54A andis electrically isolated from grounded extrusion 44A. A plurality ofinductors 70 are provided to homogenize the gas-discharge alongdischarge-volume 60A.

In laser 40, neither grounded extrusion 44A nor live electrode 54A areprovided with any internal fluid-cooling means. This avoids expensiveand difficult operations to bore holes within the grounded extrusion andthe live electrode, then to fit cooling-tubes within the holes. Suchboring and fitting operations would otherwise contribute significantlyto the manufacturing cost of the laser. Live electrode 54A isconductively cooled, transferring heat to extrusion 44A via ceramicstrips 58A.

It should be noted here that only sufficient description of the drawingof FIG. 2 is provided for understanding principles of the presentinvention. The function of other details of the drawing will be evidentto those of ordinary skill in the construction and operation of sealedRF-excited slab-lasers. It should also be noted that while a hollowextrusion allows for efficient and inexpensive fabrication of theinventive slab-laser, the term “extrusion” as used in this descriptionand in the appended claims is understood to include any equivalentmechanical structure. For example, a mechanical structure formed from aplurality of machined components.

FIG. 3 is a perspective view, partially cut-away, schematicallyillustrating another preferred embodiment 80 of a CO₂ slab-laser inaccordance with the present invention. Laser 80 is similar laser 40 ofFIG. 2, except for the manner in which grounded surface 52A and livesurface 56A are spaced apart. Extrusion 44A of laser 80 is configuredidentically with extrusion 44A of laser 40 and live electrodes 54A isalso identically configured. Accordingly, only sufficient referencenumerals are provided in FIG. 3 to describe the different spacingarrangements.

In laser 80, surfaces 52A and 56A are spaced apart by an elongatedceramic member 82 having two parallel raised edges 84. A hollow betweenceramic member 82 and grounded surface 52A formed by raised edges 84defines a discharge-volume 60B. A discharge-gap is defined by the commonheight of the raised edges. A width of the discharge-volume is definedby the separation between the raised edges. Using ceramic member 82 inplace of the pair of separate ceramic strips of laser 40 eliminates needto separately insert the ceramic strips and establish parallelismthereof.

Surface 86 of ceramic member 82 is depicted in FIG. 3 as being incontact with live surface 56A of live electrode 54A. However, ceramicmember 82 will function similarly with surface 86 thereof in contactwith grounded surface 52A of extrusion 44A. A hollow between ceramicmember 82 and live surface 56A formed by raised edges 84 will thendefine the discharge-volume in this arrangement.

FIG. 4 is a perspective view, partially cut-away, schematicallyillustrating yet another preferred embodiment 90 of a CO₂ slab-laser inaccordance with the present invention. Laser 90 is similar to laser 40of FIG. 2, except for the manner in which edges of a discharge-volume60C are defined. Accordingly, only sufficient reference numerals areprovided in FIG. 4 to describe these differences.

In laser 90, extrusion 44B includes a pair of grooves or troughs 92extending therealong, which are mutually-separated and parallel to eachother. Between grooves 92 is a surface 52B, which provides an elongatedground electrode for the laser. A pair of corresponding grooves 94 inelongated live electrode 54B are aligned with grooves 92 in extrusion44B. Between grooves 94 is a surface 56B of live electrode 54B.

Ceramic strips 58B are narrower than corresponding ceramic strips 58A oflaser 40, such that they do not completely cover grooves 92 and 94.Accordingly, in laser 90, the width of discharge-volume 60C is definedby edges 96 of grooves 92 and edges 98 of grooves 94. A discharge-gap isthe defined by the distance between grounded surface 52B and livesurface 56B. This arrangement prevents contact between the ceramicspacers and the gas-discharge, thereby avoiding possible erosion of theceramic spacers by the gas-discharge.

A variation (not shown) of laser 90 is possible wherein separate ceramicstrips 58B are replaced with a single ceramic member similar to ceramicmember 82 of laser 80. In this variation, the raised edges of theceramic member are spaced-apart such that the width of discharge-volume60C is defined by edges 96 of grooves 92 or edges 98 of grooves 94, asin laser 90.

FIG. 5 is a cross-sectional view, seen generally in the direction 5-5 ofFIG. 4, schematically illustrating two fluid-cooled cooling-plates 100and 102 attached to respectively lower and upper exterior surfaces ofextrusion 44B of laser 90. Cooling-plate 100 includes a cooling-fluidconduit 104 having a D-shaped cross-section pressed into a U-shapedgroove 106. Conduit 104 is preferably continuous, arranged in aserpentine fashion over an area to be cooled. Cooling plate 100 islocated adjacent to surface 52B, which is the ground electrode.Cooling-plate 102 includes a cooling-fluid conduit 108 having a D-shapedcross-section pressed into a U-shaped groove 110. Conduit 108 is alsopreferably a continuous and arranged in a serpentine fashion.Cooling-plate 102 provides additional cooling of extrusion 44B.

A common cooling fluid is water, often with additives to preventcorrosion and freezing. An advantage of using separate cooling-platesrather than providing direct fluid-cooling within extrusion 44B is thatis fabricating cooling-plates 100 and 102 is much simpler that machininga similar serpentine cooling path within extrusion 44B. Further, shouldany corrosion or other damage occur to the conduit, the conduit could bereplaced quickly and easily. If necessary, it would be even quicker toexchange the entire cooling-plate.

Cooling-plates, such as cooling-plates 100 and 102, may optionally beattached to any embodiment of slab-laser in accordance with the presentinvention. One or both plates may be advantageous, depending on thepower applied to the gas-discharge and the efficiency of the slab-laser.Cooling-plate 100 will generally be most effective in conductivelycooling the live electrode, because of a relatively short andunrestricted thermal path from the live electrode through the ceramicspacers and the extrusion.

FIG. 6 is a perspective view, cut away, schematically illustrating stillanother preferred embodiment 120 of a CO₂ slab-laser in accordance withthe present invention. Laser 120 is similar to laser 40 of FIG. 2,except that each ceramic strip is formed by a plurality of ceramicsegments 58C. In FIG. 6, live electrode 54A and all the elements aboveit have been omitted for clarity of illustration. Neighboring ceramicsegments 58C are slightly separated from each other, the separationbeing small compared to the length of each ceramic segment 58C.

This segmented arrangement has advantages for making the ceramic stripsless expensive to fabricate and to install within laser 120 and also forreducing acoustic noise. Acoustic noise, and vibrations in general, maycause noise in beam parameters of the output laser-radiation (forexample, changes in beam pointing) and reduce the overall lifetime ofthe laser. To further reduce acoustic noise, all of the preferredembodiments of the present invention described herein avoid air-coolingmeans, which would include cooling fins that are in close thermal andtherefore mechanical contact with one or both of the electrodes.Although identical ceramic segments are depicted in FIG. 6, the ceramicsegments may also have different lengths to facilitate manufacture or tomitigate acoustic noise of laser 120. Ceramic member 82 of FIG. 3 andceramic strips 58B of FIG. 4 may be similarly segmented to realize thesame advantages.

It should be noted that while the present invention is described hereinwith reference to a CO₂ slab-laser having a CO₂ gas mixture, principlesof the invention are equally applicable to a carbon monoxide (CO)slab-laser having a CO gas mixture. CO slab-lasers deliver outputlaser-radiation at wavelengths within a range from about 4.5 μm to about6.0 μm. It should also be noted that while an object of the invention isto provide a laser for dental operations at a cost justifiable by adental practitioner, lasers in accordance with the present invention maybe useful in any other applications for which the price of a high-powerprior-art slab-laser would be prohibitive.

In summary, the present invention is described above with reference topreferred embodiments. The invention is not limited, however, to theembodiments described herein. Rather, the invention is limited only bythe claims, appended hereto.

What is claimed is:
 1. A gas-discharge slab laser, comprising: alaser-housing including an elongated unitary metal hollow extrusionhaving an interior planar surface forming a first planar electrode; asecond elongated planar electrode located within the hollow portion ofthe elongated extrusion, the second elongated planar electrodespaced-apart and parallel to the first elongated electrode, thespaced-apart first and second elongated planar electrodes defining aslab shaped discharge-gap of the slab laser, neither the elongatedextrusion nor the second elongate electrode including any fluid coolantchannels; a pair of laterally spaced elongated ceramic strips locatedbetween the elongated planar electrodes for spacing apart the first andsecond elongated planar electrodes, and with the height of the ceramicstrips defining the height of the discharge and with the ceramic stripsbeing outside the central portion of the discharge area and with theceramic strips providing a heat path from the second electrode to theextrusion for conductively cooling the second electrode; a pair ofresonator mirrors, one mirror located at one end of the elongated planarelectrodes and the second mirror located at the other end of theelongated planar electrodes and wherein the spacing between theelongated planar electrodes defines a waveguide that constrains thelaser radiation modes and wherein lateral spacing between the ceramicstrips is sufficient so as not to constrain the laser radiation modesand the resonator mirrors define an unstable laser resonator in the axistransverse to the waveguide axis; and a first fluid cooled plateattached to a first exterior surface of the elongated extrusion,adjacent the first planar electrode.
 2. The slab laser as recited inclaim 1 further including a second fluid-cooled plate attached to asecond exterior surface of the elongated extrusion, which is on anopposite side of the elongated extrusion from the first exteriorsurface.
 3. The slab laser as recited in claim 2 wherein each fluidcooled plate further includes a fluid conduit having a D-shapedcross-section pressed into a U-shaped groove formed in the fluid cooledplate.
 4. The slab laser as recited in claim 3 wherein the conduit ineach fluid cooled plate has a serpentine configuration.
 5. The slablaser as recited in claim 1, wherein a separation between edges of theelongated ceramic strips defines a width of a discharge-volume.
 6. Theslab laser as recited in claim 1, further including a first pair ofgrooves in one of the first and second elongated planar electrodes,extending along the length thereof, the first pair of groovesmutually-separated and parallel to each other, the distance betweenedges of the first pair of grooves defining a width of adischarge-volume.
 7. The slab laser as recited in claim 6, furtherincluding a second pair of grooves extending along the other of thefirst and second elongated planar electrodes and aligned with the firstpair of grooves, the distance between edges of the second pair ofgrooves further defining a width of a discharge-volume.
 8. The slablaser as recited in claim 1, wherein the slab laser is a carbon dioxideslab laser having a carbon dioxide gas mixture.
 9. The slab laser asrecited in claim 1, wherein the slab laser is a carbon monoxide laserhaving a carbon monoxide gas mixture.
 10. The slab laser as recited inclaim 1, wherein the elongated extrusion is made from aluminum.
 11. Theslab laser as recited in claim 1, wherein the ceramic strips are madefrom one of a group of ceramics consisting of aluminum nitride, aluminumoxide, and beryllium oxide.
 12. The slab laser as recited in claim 1wherein the ceramic strips are formed from a plurality of segments, saidsegments being completely separated from each other, with the separationbeing smaller than the length of each segment.